In-line process for making thin film electronic devices

Details In-line process for making thin film electronic devices In-line process for making thin film electronic devices

2007-02-23

2011-12-20

McPherson, John A. (Department: 1721)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

C430S317000, C430S318000, C430S319000, C430S321000

Reexamination Certificate

active

08080366

ABSTRACT:
An in-line process for making a thin film electronic device on a substrate is described comprising the steps of: a) depositing a structurable layer onto a substrate; b) depositing a patternable material onto the structurable layer in a first pattern; and c) etching the structurable layer in areas uncovered by the patternable material. The steps are carried out without intermediate exposure of the substrate to ambient air.

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