Gas separation – Combined or convertible
Reexamination Certificate
2006-10-03
2008-12-02
Smith, Duane S (Department: 1797)
Gas separation
Combined or convertible
C055S417000, C055S418000, C055S419000, C055S503000, C055S523000, C055S525000, C055S495000
Reexamination Certificate
active
07459003
ABSTRACT:
A space-conserving integrated fluid delivery system which is particularly useful for gas distribution in semiconductor processing equipment. The invention pertains to a diffusion bonded integrated fluid flow network architecture, which includes, in addition to a layered substrate containing fluid flow channels, an in-line filter and may include various fluid handling and monitoring components. The integrated fluid delivery system that is formed from a layered substrate is diffusion bonded, and the various fluid handling and monitoring components may be partially integrated or fully integrated into the substrate, depending on design and material requirements.
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Crockett Mark
DeChellis Micahel
Khullar Aneesh
Lane John W.
Melcer Chris
Applied Materials Inc.
Church, Esq Shirley L
Smith Duane S
Wu Ives
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