Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate
2009-04-10
2010-06-29
Nguyen, Vinh P (Department: 2829)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
C324S754120
Reexamination Certificate
active
07746088
ABSTRACT:
A method and apparatus for testing a plurality of electronic devices formed on a large area substrate is described. In one embodiment, the apparatus performs a test on the substrate in one linear axis in at least one chamber that is slightly wider than a dimension of the substrate to be tested. Clean room space and process time is minimized due to the smaller dimensions and volume of the system.
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Abboud Fayez E.
Brunner Matthias
Hunter James C.
Johnston Benjamin M.
Krishnaswami Sriram
Applied Materials Inc.
Nguyen Vinh P
Patterson & Sheridan LLP
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