Imprinting machine and device manufacturing method

Details Imprinting machine and device manufacturing method Imprinting machine and device manufacturing method

2005-12-07

2010-10-19

Griffin, Steven P (Department: 1791)

Plastic article or earthenware shaping or treating: apparatus

Control means responsive to or actuated by means sensing or...

Mold motion or position control

C425S171000, C425S375000, C425S385000, C425S400000, C425S419000, C264S040100, C264S293000, C264S406000, C264S496000

Reexamination Certificate

active

07815424

ABSTRACT:
An imprinting machine that brings a mold having a pattern into contact with an object and transfers the pattern onto the object includes a measurement unit that measures a position of the mold when the mold contacts the object.

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