Imprinting apparatus and imprinting method

Details Imprinting apparatus and imprinting method Imprinting apparatus and imprinting method

2008-01-09

2010-11-16

Daniels, Matthew J. (Department: 1791)

Plastic and nonmetallic article shaping or treating: processes

Direct application of electrical or wave energy to work

Polymerizing, cross-linking, or curing

C425S174000, C977S887000, C264S319000

Reexamination Certificate

active

07833464

ABSTRACT:
An imprinting apparatus and an imprinting method that prevents movement of an imprinting mold during an imprinting process. The imprinting method includes coating a resin on a substrate; aligning an imprinting mold on the resin; temporarily securing the imprinting mold on the substrate; pressing the imprinting mold; hardening the resin; and detaching the imprinting mold.

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Tan, H, A. Gilbertson, S. Chou, Roller nanoimprint lithography, J. Vac. Sci. Technol. B, vol. 16, No. 6 (Nov./Dec. 1998), pp. 3926-3928.
Bender, M. et al., Fabrication of Nanostructures using a UV-based imprint technique, Microelectronic Engineering, vol. 53 (2000), pp. 233-236.

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