Impedance matching device for SiO.sub.2 coating device and a met

Details Impedance matching device for SiO.sub.2 coating device and a met Impedance matching device for SiO.sub.2 coating device and a met

1997-12-22

2000-05-16

McKane, Elizabeth

Coating processes

Direct application of electrical, magnetic, wave, or...

Plasma

31511121, 333 173, 333 32, H05H 102, H03H 738

Patent

active

060634545

ABSTRACT:
A method of impedance matching for coating SiO.sub.2 on a bare glass. The method includes the steps of outputting a matching voltage for matching an impedance of an oscillator with an impedance of a coating unit. A converted voltage is then produced by converting the amplitude of the matched voltage to a predetermined amplitude. The converted voltage is then stabilized and the phase is detected. Next, the phase of the matched voltage is controlled according to the phase of the converted voltage.

REFERENCES:
patent: 5077499 (1991-12-01), Oku
patent: 5140223 (1992-08-01), Gesche et al.
patent: 5195045 (1993-03-01), Keane et al.
patent: 5345145 (1994-09-01), Harafuji et al.
patent: 5565737 (1996-10-01), Keane
patent: 5770922 (1998-06-01), Gerrish et al.
patent: 5815047 (1998-09-01), Sorensen et al.

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