Cleaning and liquid contact with solids – Processes – Using sequentially applied treating agents
Reexamination Certificate
2009-12-10
2011-12-13
Barr, Michael (Department: 1711)
Cleaning and liquid contact with solids
Processes
Using sequentially applied treating agents
C134S001300, C134S026000, C134S029000
Reexamination Certificate
active
08075703
ABSTRACT:
A process for cleaning a silicon electrode is provided where the silicon electrode is soaked in an agitated aqueous detergent solution and rinsed with water following removal from the aqueous detergent solution. The rinsed silicon electrode is then soaked in an agitated isopropyl alcohol (IPA) solution and rinsed. The silicon electrode is then subjected to an ultrasonic cleaning operation in water following removal from the IPA solution. Contaminants are then removed from the silicon electrode by soaking the silicon electrode in an agitated mixed acid solution comprising hydrofluoric acid, nitric acid, acetic acid, and water. The silicon electrode is subjected to an additional ultrasonic cleaning operation following removal from the mixed acid solution and is subsequently rinsed and dried. In other embodiments of the present disclosure, it is contemplated that the silicon electrode can be soaked in either the agitated aqueous detergent solution, the agitated isopropyl alcohol (IPA) solution, or both. Additional embodiments are contemplated, disclosed, and claimed.
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Avoyan Armen
Outka Duane
Shih Hong
Zhou Catherine
Barr Michael
Dennis Caitlin N
Dinsmore & Shohl LLP
Lam Research Corporation
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