Immersion lithography fluids

Details Immersion lithography fluids Immersion lithography fluids

2011-08-30

2011-08-30

Davis, Daborah Chacko (Department: 1722)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

C252S588000, C252S589000, C252S582000

Reexamination Certificate

active

08007986

ABSTRACT:
Suitable additives that may be added into immersion fluids, immersion fluids comprising at least one carrier medium selected from an aqueous fluid, a non-aqueous fluid, and mixtures thereof, and immersions fluids comprising at least one carrier medium and at least one additive useful for performing immersion lithography at an operating wavelength ranging from 140 nm to 365 nm are disclosed herein.

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