Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2011-07-26
2011-07-26
Glick, Edward J (Department: 2882)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S030000
Reexamination Certificate
active
07986395
ABSTRACT:
A lithography apparatus includes an imaging lens module; a substrate table positioned underlying the imaging lens module and configured to hold a substrate; and a cleaning module adapted to clean the lithography apparatus. The cleaning module is selected from the group consisting of an ultrasonic unit, a scrubber, a fluid jet, an electrostatic cleaner, and combinations thereof.
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Chang Ching-Yu
Lin Burn Jeng
Lin Chin-Hsiang
Asfaw Mesfin T
Glick Edward J
Haynes and Boone LLP
Taiwan Semiconductor Manufacturing Company , Ltd.
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