Imaging type x-ray microscope apparatus with Schwarzschild optic

X-ray or gamma ray systems or devices – Specific application – Telescope or microscope

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378 70, 378 84, 378145, G21K 700

Patent

active

051310236

ABSTRACT:
An imaging X-ray microscope having an X-ray radiation source, a condenser for condensing X-rays radiated from the X-ray source on an object, an objective for forming an image of the object by the X-rays transmitted through or diffracted by the object, and an X-ray detector for receiving the image formed by the objective, the objective comprising a Schwarzschild optical system in which a concave mirror with an opening in the center thereof and a convex mirror are coaxially arranged in such a manner that the convex mirror opposes to the opening of the concave mirror, the object-side numerical aperture is at least 0.24, and the following condition is satisfied:

REFERENCES:
patent: 5022064 (1991-06-01), Iketaki

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