Imaging energy filter equipped with distortion corrector

Details Imaging energy filter equipped with distortion corrector Imaging energy filter equipped with distortion corrector

1999-02-26

2000-10-31

Nguyen, Kiet T.

Radiant energy

Electron energy analysis

250396ML, H01J 4946

Patent

active

061406422

ABSTRACT:
There is disclosed an imaging energy filter equipped with a distortion corrector. The energy filter is incorporated in an electron microscope and includes a spectrometer having magnets for producing magnetic fields. In this spectrometer, coils for exciting the magnets and potentiometers having variable resistors are connected in parallel. The variable resistors of the potentiometers are shifted to control the ratio of currents flowing into coils of shunting circuits.

REFERENCES:
patent: 4851670 (1989-07-01), Krivanek
patent: 5448063 (1995-09-01), De Jong et al.
patent: 5449914 (1995-09-01), Rose et al.
patent: 5952656 (1999-09-01), Kaneyama

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