4. Radiant energy
  5. Electron energy analysis

Masami Terauchi

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Electron microscope equipped with X-ray spectrometer

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Energy filter

Radiant energy – Electron energy analysis
Reexamination Certificate

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Energy filter and electron microscope using same

Radiant energy – Electron energy analysis
Reexamination Certificate

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Imaging energy filter equipped with distortion corrector

Radiant energy – Electron energy analysis
Patent

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Profile ID: LFUS-PAI-P-1818821

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