Imaging device in a projection exposure machine

Details Imaging device in a projection exposure machine Imaging device in a projection exposure machine

2005-12-21

2009-02-03

Nguyen, Hung Henry (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C355S055000, C359S823000

Reexamination Certificate

active

07486382

ABSTRACT:
An imaging device in a projection exposure machine for microlithography includes at least one optical element and at least one manipulator, a linear drive for manipulating the position of the optical element. The linear drive has at least one moving element, the moving element having a shearing part and a lifting part. The shearing part is arranged to move the optical element and the lifting part is arranged to move the shearing part. The linear drive has a supporting element which is in contact with and prevents movement of the optical element while the shearing part is moved by the lifting part.

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