Image signal processing method in scanning electron microscope a

Details Image signal processing method in scanning electron microscope a Image signal processing method in scanning electron microscope a

1993-11-09

1996-06-04

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

2502521, H01J 37256

Patent

active

055235689

ABSTRACT:
An image signal processing method in which inspection of a specimen is performed based on the image data collected for the wafer or other specimen by scanning a pilot specimen in a scanning electron microscope, prior to the scanning of the specimen to be inspected. The number of scans of the specimen to be inspected can be reduced, the dose of the primary electrons irradiated can be reduced, and high-quality image data can be obtained in a short time. For a pilot specimen, the image data are collected by making multiple scans in a scanning electron microscope 1. From the obtained image data, the evaluated relative feature function ERFF of an electro-optical cylinder of a scanning electron microscope 1 is calculated (step S01). For the specimen as the inspection object, the image data are collected in a number of scans less than that for the aforementioned pilot specimen in a scanning electron microscope 1. The degraded image of the image data is then corrected using the evaluated relative feature function ERFF of the electro-optical cylinder of the scanning electron microscope (step S02).

REFERENCES:
patent: 4567364 (1986-01-01), Kano et al.
patent: 4766311 (1988-08-01), Seiler et al.
patent: 4818873 (1989-04-01), Herriot
patent: 4847495 (1989-07-01), Dubus
patent: 5001344 (1991-03-01), Kato et al.

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