Image sensor system for monitoring condition of electrode...

Details Image sensor system for monitoring condition of electrode... Image sensor system for monitoring condition of electrode...

2005-05-12

2008-08-26

Bell, Bruce F (Department: 1795)

Chemistry: electrical and wave energy

Apparatus

Electrolytic

C204S297010, C204S297060, C204S297070

Reexamination Certificate

active

07416648

ABSTRACT:
A system for use in manufacturing semiconductor devices, is provided. The system includes an electrochemical processing tool and an image sensor. The electrochemical processing tool includes an electrode located at a central region of a platen. The electrode is adapted for contacting a wafer workpiece during certain processing of the wafer workpiece using the tool. At least part of the electrode is viewable from above the platen when the electrochemical processing tool is operably assembled. The image sensor is capable of capturing an image of the viewable part of the electrode. The image sensor is positioned above the platen. The image sensor is adapted to be aimed at the electrode when an image of the electrode is to be taken with the image sensor.

REFERENCES:
patent: 6776693 (2004-08-01), Duboust et al.
patent: 6811680 (2004-11-01), Chen et al.
patent: 6837983 (2005-01-01), Duboust et al.
patent: 6841057 (2005-01-01), Wadensweiler et al.
patent: 6848970 (2005-02-01), Manens et al.
patent: 6863794 (2005-03-01), Tsai et al.
patent: 6863797 (2005-03-01), Sun et al.
patent: 7127098 (2006-10-01), Shimoda et al.
patent: 2001/0039163 (2001-11-01), Southwick
patent: 2002/0130049 (2002-09-01), Chen et al.
patent: 2003/0053676 (2003-03-01), Shimoda et al.
patent: 2003/0121890 (2003-07-01), Kuo
patent: 2004/0178060 (2004-09-01), Ravkin et al.
patent: 2004/0201483 (2004-10-01), Stam et al.
patent: 2005/0173259 (2005-08-01), Mavliev et al.
patent: 2006/0180465 (2006-08-01), Mavliev et al.

Affiliated with

Also associated with

Rating

Image sensor system for monitoring condition of electrode... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Image sensor system for monitoring condition of electrode..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Image sensor system for monitoring condition of electrode... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3993402