Image sensor manufacturing method

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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29572, 136258, 156648, 156656, 427 86, C23F 102, B44C 122, H01L 3100

Patent

active

046718532

ABSTRACT:
In a method of manufacturing image sensors, an electrode layer of an opaque metal material is formed on a transparent ceramic substrate and is patterned into individual electrodes in photoengraving process. An amorphous semiconductor layer is deposed over the electrodes formed on the substrate and a common electrode is formed on the amorphous semiconductor layer. The amorphous semiconductor layer is exposed with light rays through the substrate so that each portions of the layer which is located above surface regions of the substrate between the electrodes have high electric resistance.

REFERENCES:
patent: 4528065 (1985-07-01), Yamazaki
patent: 4568409 (1986-02-01), Caplan
D. L. Staebler et al., "Reversible Conductivity Changes in Discharge-Produced Amorphous Si.sup.a ", Applied Physics Letters, vol. 31, No. 4, Aug. 15, 1977, pp. 292-294.

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