Data processing: measuring – calibrating – or testing – Measurement system – Dimensional determination
Reexamination Certificate
2006-11-28
2006-11-28
Bui, Bryan (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system
Dimensional determination
C250S306000, C702S167000
Reexamination Certificate
active
07143005
ABSTRACT:
A method of extracting the shape of a probe tip of a probe-based instrument from data obtained by the instrument is provided. The method employs algorithms based on the principle that no reconstructed image points can physically occupy the same region as the tip during imaging. Sequential translates of the tip shape or volume sweep out an area or volume that is an “exclusion zone” similar to morphological erosion. The embodiments of the alternative method use either the region defined by the tip boundary or simply the tip boundary.
REFERENCES:
patent: 6489611 (2002-12-01), Aumond et al.
patent: 6810354 (2004-10-01), Dahlen
Dahlen Gregory A.
Foreman William
Boyle Fredrickson Newholm Stein & Gratz S.C.
Bui Bryan
Le John
Veeco Instruments Inc.
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