Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1990-12-10
1992-08-25
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250397, H01J 3726
Patent
active
051421470
ABSTRACT:
The present invention discloses an image processing device for an electron microscope intending to improve the image quality by subjecting image data D.sub.t to interframe integration, comprising means for detecting at least either one of variations of said image data D.sub.t in 1 frame unit and modifications in the observation condition of the electron microscope; a frame memory storing image data .intg.D.sub.t after the integration subjected to the interframe integration; integrating means for executing the interframe integration with a degree of integration corresponding to at least either one of the variations and the modifications between the image data D.sub.t and the image data .intg.D.sub.t after the integration and storing the image data after the integration in the frame memory as new image data .intg.D.sub.t after the integration; and means for displaying the image data .intg.D.sub.t after the integration as an observed image. By using the construction described above it is possible to provide an image processing device for an electron microscope, which can make the property of following variations and the effect of improving the image quality compatible, because the degree of integration is decreased automatically, in the case where the property of following variations is expected rather than the effect of improving the image quality, when there are variations in the image data in 1 frame unit or modifications in the observation condition of the electron microscope.
REFERENCES:
patent: 4866273 (1989-09-01), Kobayashi et al.
patent: 4907287 (1990-03-01), Homma et al.
Hirashima Tomoyasu
Kawamata Shigeru
Anderson Bruce C.
Hitachi Naka Seiki, Ltd.
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