Image-forming materials sensitive to high-energy beam

Details Image-forming materials sensitive to high-energy beam Image-forming materials sensitive to high-energy beam

1985-07-10

1988-07-12

Michl, Paul R.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

430278, 430280, 430296, 522148, 522150, 522151, 522152, 522153, 5253322, 525273, 5253262, 5253265, 5253267, 5253273, 526256, 526257, 526243, 526245, 526250, 526253, 526255, G03C 194, G03C 176, C08F 808, C08F 834

Patent

active

047569891

ABSTRACT:
Disclosed is an image-forming material having a high sensitivity to high-energy beams and excellent in dry etching resistance, heat stability and resolution which comprises a copolymer containing a total of 1 to 99 mole-% of at least one of recurring structural units represented by the following formulas [A] and [A'] and 1 to 99 mole-% of at least one recurring structural unit represented by the following formula [B] and having a number-average molecular weight of 500 to 1,000,000: ##STR1## wherein R.sub.1 of the formulas [A] and [A'] represents a hydrogen or halogen atom, or an alkyl group having 1 to 6 carbon atoms, the substituent groups R.sub.1, epoxy group, and thiiranyl group being attached to the position ortho, meta, or para to the carbon atom in the main chain; X, Y, and Z of the formula [B] represent each a hydrogen atom, halogen atom, cyano group, alkyl group having 1 to 6 carbon atoms, halogenated alkyl group having 1 to 6 carbon atoms, aryl group having 6 to 30 carbon atoms and bearing a substituent alkyl or halogenated alkyl group having 1 to 6 carbon atoms, aryl group having 6 to 30 carbon atoms, --COOR.sub.2, --COR.sub.2, --O--COR.sub.2 (wherein R.sub.2 represents an alkyl or halogenated alkyl group having 1 to 12 carbon atoms, aryl group having 6 to 30 carbon atoms and bearing a substituent alkyl or halogenated alkyl group having 1 to 6 carbon atoms, or aryl group having 6 to 30 carbon atoms), nitro group, substituent group containing a hetero ring bearing substituent R.sub.3 (R.sub.3 represents a hydrogen atom, hydroxyl group, carboxyl group, halogen atom, nitro group, amino group, cyano group, alkyl or halogenated alkyl group having 1 to 6 carbon atoms, or aryl group having 6 to 30 carbon atoms), or substituent group containing a silicon atom. An image forming method using this material and an image-forming element are also disclosed.

REFERENCES:
patent: 2807599 (1957-09-01), Burk et al.
patent: 3916035 (1975-10-01), Brewer
patent: 4285788 (1981-08-01), Eranian et al.
patent: 4528332 (1985-07-01), Ai et al.
Bartelt et al., "J. Electrochem. Soc., vol. 122, No. 4, pp. 541-544, (1975).
Polymer Preprints, Japan, vol. 29, No. 2, p. 215.
Crivello, Advance in Polymer Science 62, pp. 1-2.

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