Image focusing method and apparatus for electron microscope

Details Image focusing method and apparatus for electron microscope Image focusing method and apparatus for electron microscope

1986-04-03

1988-02-09

Church, Craig E.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250311, 250396ML, G01N 2304, H01J 3726

Patent

active

047243198

ABSTRACT:
A method and apparatus for automatically focussing a specimen image in an electron microscope. Excitation currents for an objective lens of the microscope are previously determined in accordance with predetermined magnifications in one-to-one correspondence. When one of the magnifications is selected, the objective lens is automatically excited with the current corresponding to the magnification, whereby the specimen image is automatically properly focussed.

REFERENCES:
patent: 3504176 (1970-03-01), Thon
patent: 3715582 (1973-02-01), Akahori et al.
patent: 3719776 (1973-03-01), Fujiyasu et al.
patent: 3737617 (1973-06-01), Llop et al.

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