Image distortion-free, image rotation-free electron microscope

Details Image distortion-free, image rotation-free electron microscope Image distortion-free, image rotation-free electron microscope

1982-06-29

1985-01-15

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250396R, 250396ML, G01N 2300

Patent

active

044940009

ABSTRACT:
A transmission electron microscope comprises an imaging electron lens system constituted in at least five stages by an objective lens, a group of intermediate lenses and a group of projector lenses to which excitation currents are applied with alternately different polarities. Lens current control means is provided for controlling the excitation currents in such a manner that the lenses belonging to the intermediate lens group and the projector lens group, respectively, serve as reduction lens when the microscope is operated in a predetermined range of low magnifications, while all the electron lenses serve as magnifying lenses in a predetermined range of high magnitudes. When the magnification is changed over, the lens current control means regulates the excitation currents in such a manner that the difference between the excitation currents supplied to the intermediate lens group and the projector lens group, respectively, is maintained substantially constant.

REFERENCES:
patent: 2418349 (1947-04-01), Hillier et al.
patent: 3715582 (1973-02-01), Akahori et al.
patent: 3746855 (1973-07-01), Hilditch
patent: 3851172 (1974-11-01), Ozasa

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