Image correction system for scanning electron microscope

Details Image correction system for scanning electron microscope Image correction system for scanning electron microscope

1989-03-31

1990-03-06

Boudreau, Leo H.

Image analysis

Histogram processing

For setting a threshold

250311, 250396R, 250397, G06K 940

Patent

active

049072870

ABSTRACT:
An image correcting apparatus for correcting distortion appearing in an image produced by electron beam scanning in a SEM under the influence of electric, magnetic and mechanical vibrations through arithmetic operations for eliminating the distortion. Installation of electric shield, magnetic shield and vibration-damping structure is thus rendered unnecessary.

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patent: 4494000 (1985-01-01), Shii et al.
patent: 4585943 (1986-04-01), Yasuda et al.
patent: 4618766 (1986-10-01), von der Mast et al.
patent: 4651341 (1987-03-01), Nakashima et al.
patent: 4680469 (1987-07-01), Nomura et al.
patent: 4695725 (1987-09-01), Mori et al.

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