Illuminator for a lithographic apparatus and method

Details Illuminator for a lithographic apparatus and method Illuminator for a lithographic apparatus and method

2011-05-31

2011-05-31

Kim, Peter B (Department: 2882)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000

Reexamination Certificate

active

07952685

ABSTRACT:
An illuminator for a lithographic apparatus, the illuminator including an illumination mode defining element and a plurality of polarization modifiers, the polarization modifiers being moveable into or out of partial intersection with a radiation beam having an angular and spatial distribution as governed by an illumination mode defining element.

REFERENCES:
patent: 5323207 (1994-06-01), Ina
patent: 7508493 (2009-03-01), Takeuchi et al.
patent: 2005/0225829 (2005-10-01), Schenker
patent: 2005/0237509 (2005-10-01), Blatchford
patent: 2006/0012769 (2006-01-01), Suzuki
patent: 2006/0139590 (2006-06-01), Kunst et al.
patent: 2008/0013065 (2008-01-01), Kohl

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