Illumination tailoring system using photochromic filter

Details Illumination tailoring system using photochromic filter Illumination tailoring system using photochromic filter

1994-08-31

1997-03-25

Gellner, M. L.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 53, 355 67, G03B 2742

Patent

active

056149905

ABSTRACT:
Photochromic glass is situated between a light source for exposing resist coated on a wafer and the wafer. The photochromic glass is activated by a wavelength different from that which activates the resist. An array of individual light sources, each of varying intensity, provide activation light to the photochromic glass. A CCD array temporarily in the imaging plane measures light intensity distribution. A controller varies the individual light source array intensities to activate the photochromic glass to varying degrees to produce a desired effect at the imaging plane.

REFERENCES:
patent: 3970382 (1976-07-01), Fisher et al.
patent: 4447128 (1984-05-01), Ferrer
patent: 4570252 (1986-02-01), Drexler
patent: 4831452 (1989-05-01), Takanashi et al.
patent: 4875076 (1989-10-01), Torigoe et al.
patent: 5055871 (1991-10-01), Pasch
patent: 5137363 (1992-08-01), Kosugi et al.
patent: 5162642 (1992-11-01), Okamotsu et al.
patent: 5274420 (1993-12-01), Chastang et al.
Rabek, J. F., et al, "Coordination Complexes Between Iron (III) Chloride and Polyether, Polyester, and Poly(ether ester), Marcomolecules," vol. 24, No. 4, pp. 836-841, 1991.
Noguchi, et al., "Subhalf Micron Lithography System with Phase-Shifting Effect", Cannon, Inc., 14 pages.

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