Illumination system with zoom objective

Details Illumination system with zoom objective Illumination system with zoom objective

2007-04-05

2009-12-01

Harrington, Alicia M (Department: 2873)

Optical: systems and elements

Lens

With reflecting element

C355S067000

Reexamination Certificate

active

07626770

ABSTRACT:
Illumination systems which are designed to illuminate a field in a field plane and simultaneously illuminate a pupil plane with radiation from a light source are disclosed.

REFERENCES:
patent: 5237367 (1993-08-01), Kudo
patent: 6195201 (2001-02-01), Koch et al.
patent: 6198793 (2001-03-01), Schultz et al.
patent: 6438199 (2002-08-01), Schultz et al.
patent: 6658084 (2003-12-01), Singer
patent: 6704095 (2004-03-01), Schultz
patent: 2006/0132747 (2006-06-01), Singer et al.
patent: WO 2006/021419 (2006-03-01), None

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