Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-12-05
2006-12-05
Kim, Peter B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S067000
Reexamination Certificate
active
07145637
ABSTRACT:
An illumination system having a light source is disclosed, the light source having a source size and emitting radiant power in a spatial angle element Ω(α), α indicating the aperture angle, a collector, which collects radiant power from the source up to a first maximum aperture angle αmax(1), a first geometric flux G1being defined by the source size Q and the first maximum aperture angle αmax(1), a plane to be illuminated having an area A and a numerical aperture NA to be illuminated, the numerical aperture NA to be illuminated defining a second aperture angle α(2), and a second geometric flux G2being defined by the area A and the second aperture angle α(2), distinguished in that the collector has a first maximum aperture angle αmax(1), which is selected in such a way that the first geometric flux G1is equal to or larger than, particular preferably more than 15% larger than the second geometric flux G2.
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International Search Report for PCT/EP03/08968, dated Aug. 17, 2004, 2 pages.
Carl Zeiss SMT AG
Kim Peter B.
Ohlandt Greeley Ruggiero & Perle L.L.P.
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