Illumination system for projection exposing apparatus

Details Illumination system for projection exposing apparatus Illumination system for projection exposing apparatus

1993-11-22

1995-02-07

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 53, 355 67, G03B 2772, G03B 2754

Patent

active

053879619

ABSTRACT:
An illumination system for a projection exposing apparatus having an improved fly's eyes lens is disclosed in which an individual lens of a fly's eyes lens includes a pattern portion having a plurality of annuluses with the same center but different diameters, and an etch portion disposed alternately with the pattern portion. The etch portion is formed to have a phase difference of 180 degrees with respect to the pattern portion.

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