Illumination system for a microlithography projection...

Details Illumination system for a microlithography projection... Illumination system for a microlithography projection...

2005-02-24

2009-06-23

Kim, Peter B (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000

Reexamination Certificate

active

07551261

ABSTRACT:
An illumination system for a microlithography projection exposure apparatus has a light distribution device (21), which generates a two-dimensional intensity distribution from the light from a primary light source, for example a laser, in a first surface (25) of the illumination system. A fly's eye condenser (55) having a first and a second raster arrangement (40) of optical elements serves as a light mixing device for homogenizing the illumination in the illumination field of the illumination system. The fly's eye condenser has a first raster arrangement (35) of first raster elements (36) and also a second raster arrangement (40) of second raster elements (41). The light distribution device comprises at least one diffractive optical element (21) for generating an angular distribution whose far field has separate or contiguous luminous zones which are coordinated with the form and size of the first raster elements (36).

REFERENCES:
patent: 5576801 (1996-11-01), Ushida et al.
patent: 5760963 (1998-06-01), Mori et al.
patent: 5926257 (1999-07-01), Mizouchi et al.
patent: 6211944 (2001-04-01), Shiraishi
patent: 6252647 (2001-06-01), Shiraishi
patent: 2001/0028925 (2001-10-01), Moshrefzadeh et al.
patent: 0 949 541 (1999-10-01), None
patent: 1 109 067 (2001-06-01), None
Patent Abstracts of Japan, vol. 1998, No. 8, Jun. 30, 1998; JP 10 070070 A (Canon Inc.), Abstract Figures 1-4.

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