Illumination system and scan type exposure apparatus

Details Illumination system and scan type exposure apparatus Illumination system and scan type exposure apparatus

1995-12-26

2000-06-27

Metjahic, Safet

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 53, 355 71, G03B 2754, G03B 2742, G03B 2772

Patent

active

060813199

ABSTRACT:
An illumination system includes a light source for providing pulse light, and a scanning system for relatively and scanningly moving an article, to be illuminated, relative to an illumination region to be defined by the pulse light, wherein, in a light intensity distribution defined in the illumination region with respect to a scan direction, the light intensity changes non-linearly from an least one end portion to a highest light intensity point in the distribution, wherein the light intensity distribution includes a first point at the one end portion, a second point whereat light intensity increase changes, a third point whereat light intensity increase changes, and a fourth point whereat the light intensity is highest, and wherein at least one of a width Wa between the first and second points and a width Wb between the third and fourth points substantially corresponds to or is greater than the relative movement amount between the illumination region and the article per pulse.

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