Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2007-04-30
2010-12-07
Kim, Peter B (Department: 2882)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000
Reexamination Certificate
active
07847920
ABSTRACT:
An illumination system for illuminating a reticle that moves along a scanning direction in a microlithographic projection exposure apparatus has an optical axis and an optical component producing an illumination angle distribution of the projection light. In accordance with the illumination angle distribution, a plurality of poles is illuminated in a pupil plane of the illumination system. The poles form an arrangement that is only mirror-symmetrical with respect to an axis that is orthogonal to the optical axis of the illumination, but neither parallel nor perpendicular to the scanning direction.
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Fiolka Damian
Maul Manfred
Scholz Axel
Carl Zeiss SMT AG
Fish & Richardson P.C.
Kim Peter B
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