Illumination system and exposure apparatus having the same

Details Illumination system and exposure apparatus having the same Illumination system and exposure apparatus having the same

1996-07-02

1998-12-08

Church, Craig E.

X-ray or gamma ray systems or devices

Specific application

Lithography

378 43, G21K 500

Patent

active

058481192

ABSTRACT:
An illumination system includes a spectral optical element for separating radiation light from a radiation source, including at least one of X-rays and vacuum ultraviolet rays. The spectral optical element provides an emission angle to the radiation light which changes with the wavelength thereof. The system also includes an optical arrangement for illuminating an object with radiation light of a particular wavelength from the spectral optical element, and an absorption element for absorbing at least a portion of radiation light of a wavelength longer than the particular wavelength from the spectral optical element.

REFERENCES:
patent: 4028547 (1977-06-01), Eisenberger

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