Illumination optical system, exposure method and apparatus...

Details Illumination optical system, exposure method and apparatus... Illumination optical system, exposure method and apparatus...

2005-04-05

2005-04-05

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S071000, C355S077000

Reexamination Certificate

active

06876437

ABSTRACT:
An illumination optical system for illuminating a mask using light from a light source includes a shape varying mechanism for continuously making a shape of an effective light source variable, wherein the shape varying mechanism includes a first stop plate that has a first aperture part for allowing the light to pass through the first aperture part, and a second stop plate that has second aperture part for allowing the light that has passed through the first stop plate through the second aperture part.

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