Method of forming a beam for a MEMS switch

Details Method of forming a beam for a MEMS switch Method of forming a beam for a MEMS switch

2005-04-19

2005-04-19

Arbes, Carl J. (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S592100, C029S600000, C029S610100, C029S623400, C029S831000, C029S842000, C200S181000, C335S078000, C333S262000, C438S048000, C438S052000

Reexamination Certificate

active

06880235

ABSTRACT:
A microelectromechanical system (MEMS) switch having a high-resonance-frequency beam is disclosed. The MEMS switch includes first and second spaced apart electrical contacts, and an actuating electrode. The beam is adapted to establish contact between the electrodes via electrostatic deflection of the beam as induced by the actuating electrode. The beam may have a cantilever or bridge structure, and may be hollow or otherwise shaped to have a high resonant frequency. Methods of forming the high-speed MEMS switch are also disclosed.

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