Illumination optical system and method of manufacturing semicond

Details Illumination optical system and method of manufacturing semicond Illumination optical system and method of manufacturing semicond

1998-01-16

1999-09-21

McPherson, John A.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

430396, 359744, 359784, 359791, 355 50, 355 53, 355 67, 355 77, G03F 720, G02B 2709, H01L 21027

Patent

active

059552433

ABSTRACT:
An illumination optical system having an afocal optical system includes a first group of lenses having negative refracting power, a second group of lenses having positive refracting power and being positioned further away from a light source than the first group of lenses, and a third group of lenses having positive refracting power and being positioned further away from the light source than the second group of lenses, wherein the afocal optical system expands a parallel beam of light emitted from the light source or converts the parallel beam of light into a parallel beam having equivalent magnification.

REFERENCES:
patent: 5245384 (1993-09-01), Mori
patent: 5724122 (1998-03-01), Oskotsky

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