Illumination optical apparatus and method having a wavefront spl

Details Illumination optical apparatus and method having a wavefront spl Illumination optical apparatus and method having a wavefront spl

1997-09-30

1998-09-29

Nelms, David C.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 67, 359619, G03B 2772

Patent

active

058152490

ABSTRACT:
A diffraction grating is set between a light source and a fly-eye lens composed of a plurality of lens elements rectangular in cross section, and using the zeroth order diffraction beam and .+-.first order diffraction beams emergent from the diffraction grating, a plurality of light source images are formed along the longitudinal direction on the exit plane of each lens element in the fly-eye lens. In a preferred mode the intensity of illumination light on a mask is increased using first and second light sources, and a first illumination beam, which is obtained by combining a beam emitted from the first light source and passing through a half prism with a beam emitted from the second light source and reflected by the half prism on a same axis, and a second illumination beam, which is obtained by combining a beam emitted from the first light source and reflected by the half prism with a beam emitted from the second light source and passing through the half prism on a same axis, are made incident into the fly-eye lens as being inclined symmetrically with each other with respect to the optical axis of illumination optical system.

REFERENCES:
patent: 4918583 (1990-04-01), Kudo et al.
patent: 5016149 (1991-05-01), Tanaka et al.
patent: 5335044 (1994-08-01), Shiraishi
patent: 5420417 (1995-05-01), Shiraishi

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