Photocopying – Projection printing and copying cameras – Illumination systems or details
Patent
1997-08-29
1998-09-29
Nelms, David C.
Photocopying
Projection printing and copying cameras
Illumination systems or details
355 67, 355 70, 355 69, 355 68, 359619, G03B 2732
Patent
active
058152482
ABSTRACT:
A diffraction grating is set between a light source and a fly-eye lens composed of a plurality of lens elements rectangular in cross section, and using the zeroth order diffraction beam and .+-.first order diffraction beams emergent from the diffraction grating, a plurality of light source images are formed along the longitudinal direction on the exit plane of each lens element in the fly-eye lens. In a preferred mode the intensity of illumination light on a mask is increased using first and second light sources, and a first illumination beam, which is obtained by combining a beam emitted from the first light source and passing through a half prism with a beam emitted from the second light source and reflected by the half prism on a same axis, and a second illumination beam, which is obtained by combining a beam emitted from the first light source and reflected by the half prism with a beam emitted from the second light source and passing through the half prism on a same axis, are made incident into the fly-eye lens as being inclined symmetrically with each other with respect to the optical axis of illumination optical system.
REFERENCES:
patent: 4497013 (1985-01-01), Ohta
patent: 4497015 (1985-01-01), Konno et al.
patent: 4619508 (1986-10-01), Shibuya et al.
patent: 4668077 (1987-05-01), Tanaka
patent: 4699515 (1987-10-01), Tanimoto et al.
patent: 4747678 (1988-05-01), Shafer et al.
patent: 4918583 (1990-04-01), Kudo et al.
patent: 4924257 (1990-05-01), Jain
patent: 4939630 (1990-07-01), Kikuchi et al.
patent: 5016149 (1991-05-01), Tanaka et al.
patent: 5153773 (1992-10-01), Muraki et al.
patent: 5194893 (1993-03-01), Nishi
patent: 5335044 (1994-08-01), Shiraishi
patent: 5420417 (1995-05-01), Shiraishi
patent: 5452054 (1995-09-01), Dewa et al.
Nishi Kenji
Shiraishi Naomasa
Nelms David C.
Nikon Corporation
Tran Andrew Q.
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