Illumination method and apparatus for the formation of micro pat

Details Illumination method and apparatus for the formation of micro pat Illumination method and apparatus for the formation of micro pat

1996-12-09

1999-07-13

Baxter, Janet

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

430325, 250225, G03C 500, G02F 101

Patent

active

059225130

ABSTRACT:
The illumination method and apparatus used to form micro patterns, which can determine an ellipticity exhibiting optimum contrast gap and contrast by deriving a polarization distribution function by use of equations induced in accordance with the vector image theory and deriving S and P-polarized components (S.sub.com and P.sub.com) (these components are perpendicular to and parallel to a meridional plane, respectively) of polarized light having x and y-directional components entering an illumination mask, thereby, preventing a contrast difference resulting from a contrast gap generated in the conventional linear polarization method, namely, an inconsistency between the longitudinal direction of the pattern and the polarization direction. Accordingly, it is possible to easily use appropriately elliptically polarized light, thereby being capable of achieving a reduction in contrast gap while achieving an improvement in contrast. The illumination method and apparatus can easily form micro patterns in the fabrication of semiconductor devices, thereby achieving a high integration of semiconductor devices. It is also possible to increase the process margin, thereby improving yield and reliability.

REFERENCES:
patent: 5004321 (1991-04-01), Feldman et al.
patent: 5053628 (1991-10-01), Yamamoto et al.
patent: 5078482 (1992-01-01), Feldman et al.
patent: 5283141 (1994-02-01), Yoon et al.
patent: 5338630 (1994-08-01), Yoon et al.
patent: 5365371 (1994-11-01), Kamon
patent: 5541026 (1996-07-01), Matsumoto

Affiliated with

Also associated with

Rating

Illumination method and apparatus for the formation of micro pat does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Illumination method and apparatus for the formation of micro pat, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Illumination method and apparatus for the formation of micro pat will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2274805