Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent
1998-02-03
2000-10-03
McPherson, John
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
430396, 355 67, 355 77, H01L 21027
Patent
active
061270954
ABSTRACT:
An illuminating optical device comprises a light source for supplying light, and a condenser lens system for collecting the light from the light source and guiding the light onto an object to be illuminated. The condenser lens system has an optical element that has a refractive power, and that can be tilted or decentered with respect to the optical axis of the condenser lens system. By tilting or decentering the optical element, sloped illuminance distributions can be deliberately produced, which can cancel out uneven illuminance distributions having opposite slopes which originally exist in the system. Consequently, satisfactory uniform as well as desired specific non-uniform illuminance distributions can be achieved.
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patent: 5798824 (1998-08-01), Kudo
patent: 5867319 (1999-02-01), Sugiyama et al.
McPherson John
Nikon Corporation
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