Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate
2006-02-13
2009-11-17
Lee, Diane I (Department: 2851)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
C351S16000R, C351S161000
Reexamination Certificate
active
07618767
ABSTRACT:
There is disclosed an evaluation method for evaluating a one-dimensional illumination distribution using polynomials, the method comprising steps of: setting up, as the polynomials, one-dimensional power polynomials which are orthogonal in a closed interval; and approximating the one-dimensional illumination distribution with the power polynomials to obtain the coefficients of respective terms of the power polynomials.
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Kita Naonori
Toyoda Mitsunori
Asfaw Mesfin T
Lee Diane I
Nikon Corporation
Oliff & Berridg,e PLC
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