Ignitor for a microwave sustained plasma

Details Ignitor for a microwave sustained plasma Ignitor for a microwave sustained plasma

1989-03-06

1989-12-19

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

118 501, 156646, 156662, 156345, 20419237, 427 38, H01L 21306, B44C 122, C03C 1500, C03C 2506

Patent

active

048880884

ABSTRACT:
A high frequency, high voltage is capacitively applied to a process gas through a quartz tube to ignite a glow discharge within the tube. The quartz tube runs through a microwave cavity and the ignitor is positioned upstream of the cavity. The cavity is tuned for a steady state glow discharge and is not changed during initiation of the plasma. The ignitor excites the process gas into active species and the gas flow takes the species through the cavity where the microwave energy brings the gas to an ionized state and the plasma is sustained.

REFERENCES:
patent: 4175235 (1979-11-01), Niwa et al.
patent: 4316791 (1982-02-01), Taillet
patent: 4351714 (1982-09-01), Kuriyama
patent: 4581100 (1986-04-01), Hatzakis et al.
patent: 4673456 (1987-06-01), Spencer et al.
patent: 4831963 (1989-05-01), Saito et al.

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