Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Fluid growth from liquid combined with subsequent diverse...
Reexamination Certificate
2008-07-15
2008-07-15
Kebede, Brook (Department: 2823)
Semiconductor device manufacturing: process
Formation of semiconductive active region on any substrate
Fluid growth from liquid combined with subsequent diverse...
C428S195100, C427S058000
Reexamination Certificate
active
11319083
ABSTRACT:
An identification code drawing method of drawing an identification code on a substrate includes: cleaning the substrate by using a cleaning unit; performing lyophobization for the substrate; discharging liquid droplets of functional liquid, into which particles of metal or metal oxide are dispersed, from nozzles of a first liquid droplet discharging head onto a region of the substrate having been subjected to the lyophobization, on the basis of liquid droplet discharge data for drawing the identification code; and heating the liquid droplets adhered on the substrate by using a heating unit or drying the liquid droplets adhered on the substrate by using a drying unit.
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Park, H.K.; Grigoropoulos, C.P.; Leung, W.P.,“A Practical Excimer Laser-based Cleaning Tool for Removal of Surface Contaminants”, IEEE Trans Components, Packaging, and Manufacturing Technology, part A, vol. 17, No. 4, Dec. 1994.
Harness & Dickey & Pierce P.L.C.
Kebede Brook
Scarlett Shaka
Seiko Epson Corporation
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