Hydrogenated ring-opening metathesis polymer, resist...

Details Hydrogenated ring-opening metathesis polymer, resist... Hydrogenated ring-opening metathesis polymer, resist...

2008-10-15

2010-10-05

Chu, John S (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

C430S326000, C430S330000, C430S905000, C526S281000

Reexamination Certificate

active

07807331

ABSTRACT:
Resist compositions comprising a hydrogenated ring-opening metathesis polymer bearing an alicyclic structure in its backbone and comprising structural units having an oxygen atom incorporated as part of the cyclic structure exhibit a high resolution and minimal proximity bias upon ArF excimer laser lithography and have high etching resistance.

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