Photocopying – Projection printing and copying cameras – Illumination systems or details
Patent
1995-05-24
1997-05-20
Grimley, Arthur T.
Photocopying
Projection printing and copying cameras
Illumination systems or details
362268, 359569, G03B 2772, F21V 904, G02B 518
Patent
active
056317212
ABSTRACT:
An illumination system for use in photolithography having an array optical element near the formation of a desired illumination field. Light or electromagnetic radiation from an illumination source is expanded and received by a multi-image optical element forming a plurality of secondary illumination sources in a plane. A condenser receives the light from the plurality of illumination sources. A array or diffractive optical element is placed on or near the focal point of the condenser. The illumination plane formed at the focal point of the condenser is within the near field diffraction pattern of the array or diffractive optical element. There is no condenser following the array or diffractive optical element. The use of the array or diffractive optical element permits the use of a condenser between the multi-image optical element and the array or diffractive optical element having a smaller numerical aperture than the emergent numerical aperture of the diffractive optical element, and generates a desired angular distribution with little dependance on the illumination source profile.
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Gallatin Gregg
Oskotsky Mark
Stanton Stuart
Zernike Frits
Fattibene Arthur T.
Fattibene Paul A.
Grimley Arthur T.
Lane David A.
SVG Lithography Systems, Inc.
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