4. Radiant energy
  5. Photocells; circuits and apparatus
  6. Photocell controls its own optical systems

Gregg Gallatin

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Hybrid illumination system for use in photolithography

Photocopying – Projection printing and copying cameras – Illumination systems or details
Patent

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Illumination system with spatially controllable partial...

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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Off axis alignment system for scanning photolithography

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Patent

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Profile ID: LFUS-PAI-P-1157569

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