Hybrid charged particle apparatus

Details Hybrid charged particle apparatus Hybrid charged particle apparatus

1987-03-26

1988-04-26

Fields, Carolyn E.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250309, H01J 3726

Patent

active

047406984

ABSTRACT:
A hybrid charged particle apparatus includes a charged particle source which is made up of a field-emission electron source for emitting an electron beam, a liquid-metal ion source for emitting an ion beam, and changeover means for replacing one of the electron and ion sources by the other at a predetermined place without varying a vacuum state, hybrid focusing/deflecting means for focusing and deflecting each of the electron beam and the ion beam electrostatically and electromagnetically to irradiate a specimen with each of the electron beam and the ion beam, and image observing means for detecting secondary charged particles emitted from the specimen and for observing an image of a specimen surface formed by the secondary charged particles.

REFERENCES:
patent: 4562352 (1985-12-01), Shiokawa
patent: 4694170 (1987-09-01), Slodzian et al.
Semiconductor World, 5 (1984) pp. 54-58.

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