Hot edge ring with sloped upper surface

Semiconductor device manufacturing: process – Miscellaneous

Reexamination Certificate

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Details

C438S689000, C438S758000, C118S728000, C118S7230AN, C156S345510

Reexamination Certificate

active

08084375

ABSTRACT:
A hot edge ring with extended lifetime comprises an annular body having a sloped upper surface. The hot edge ring includes a step underlying an outer edge of a semiconductor substrate supported in a plasma processing chamber wherein plasma is used to process the substrate. The step includes a vertical surface which surrounds the outer edge of the substrate and the sloped upper surface extends upwardly and outwardly from the upper periphery of the vertical surface.

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patent: 2009/0200269 (2009-08-01), Kadkhodayan et al.

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