Horizontal reactor hardware design

Details Horizontal reactor hardware design Horizontal reactor hardware design

1992-10-26

1994-12-06

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Multizone chamber

118715, 118725, 118733, C23C 1600

Patent

active

053707362

ABSTRACT:
An new horizontal reactor hardware contains a reactor tube with an insulation block and a flange with exhaust outlets. The insulation block provides high temperature control which reduces condensation and process by-product buildup within the reactor tube. A cylindrical flange, which is connected to the end of the reactor tube, provides exhaust outlets integral with and extending from the flange. The exhaust outlets isolate metal components from the process environment. The flange is held in place at the end of the reactor tube by a clamp. The clamp presses the flange against the end of the reactor tube to form a seal at the junction between the reactor tube and the flange.

REFERENCES:
patent: 3828722 (1974-08-01), Reuter
patent: 4347431 (1982-08-01), Pearce
patent: 4699084 (1987-10-01), Wilson
patent: 4711197 (1987-12-01), Taylor, Sr.
patent: 4793283 (1988-12-01), Sarkozy
patent: 4803948 (1989-02-01), Nakagawa
patent: 4920920 (1990-05-01), Shigeki
patent: 5064367 (1991-11-01), Philipossian

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