Horizontal attenuated total reflection system

Details Horizontal attenuated total reflection system Horizontal attenuated total reflection system

2007-09-04

2007-09-04

Nguyen, Tu T. (Department: 2886)

Optics: measuring and testing

By polarized light examination

Of surface reflection

Reexamination Certificate

active

11393519

ABSTRACT:
Horizontally oriented attenuated total reflection (HATR) system applied in spectroscopic ellipsometer or polarimeter systems, and methodology of use.

REFERENCES:
patent: 5943136 (1999-08-01), Pipino et al.
patent: 6084675 (2000-07-01), Herzinger et al.
“Determination of the Mid-IR Optical Constants of Water and Lubricants Using IR Ellipsometry Combined with an ATR Cell”, Tiwald et al., Thin Solid Films, 313-314 (1998).
“Total Internal Reflection Ellipsometry, Principals and Applications”, Polsinski, Lenkoping University p. 12.

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