Horizontal attenuated total reflection system

Details Horizontal attenuated total reflection system Horizontal attenuated total reflection system

2011-04-05

2011-04-05

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

By polarized light examination

Of surface reflection

Reexamination Certificate

active

07920264

ABSTRACT:
Horizontally oriented attenuated total reflection (HATR) system applied in spectroscopic ellipsometer or polarimeter systems, and methodology of use.

REFERENCES:
patent: 5856873 (1999-01-01), Naya et al.
patent: 5942754 (1999-08-01), Yamaguchi et al.
patent: 5943136 (1999-08-01), Pipino et al.
patent: 6084675 (2000-07-01), Herzinger et al.

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