Homoepitaxial growth of alpha-SiC thin films and semiconductor d

Details Homoepitaxial growth of alpha-SiC thin films and semiconductor d Homoepitaxial growth of alpha-SiC thin films and semiconductor d

1987-10-26

1990-03-27

Hearn, Brian E.

Fishing, trapping, and vermin destroying

156612, 156DIG64, 148DIG148, 437105, 437106, 427429, H01L 2120, H01L 21203

Patent

active

049120646

ABSTRACT:
Device quality monocrystalline Alpha-SiC thin films are epitaxially grown by chemical vapor deposition on Alpha-SiC [0001] substrates prepared off axis.

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